MKS RGA/Mass Spectrometry 四級柱質譜殘存氣體分析儀

回上一頁

  • MKS Residual Gas Analysis/Mass Spectrometry

    產品描述

    MKS Residual Gas Analyzer亦稱為殘存氣體分析儀, 其本體為氣體專用四級柱質譜儀.依其操作環境, 真空度量測範圍及應用範籌計有常壓型及真空型兩大類型多種機型可供選擇, 詳情請來電洽詢
    應用領域範籌：

    • Vacuum Monitoring and e-Diagnostics
    • Ultra High Vacuum (UHV)
    • CVD Processes
    • Vacuum Baseline RGA
    • Ion Implant
    • Photoresist Detection
    • High-Pressure RGA
    • PVD
    • Etch
    • Diffusion
    • Transfer Chamber Monitoring
    • Leak Detection
    • Atmospheric Pressure Gas Analysis

產品-MKS

廠牌